| Title: | Database Needs for Modeling and Simulation of Plasma Processing |
| Author: | National Research Council Board on Physics and Astronomy |
| Link: | HTML and page images at NAP |
| Stable link here: | http://onlinebooks.library.upenn.edu/webbin/book/lookupid?key=olbp24600 |
| Subject: | Semiconductors -- Design and construction -- Congresses |
| Subject: | Plasma engineering -- Databases -- Congresses |
| Subject: | Plasma engineering -- Computer simulation -- Congresses |
| Call number: | TK7871.85 .D374 1996 |
| Other copies: | Look for editions of this book at your library, or elsewhere. |
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