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Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon /

Title:Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon /
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Note:[Washington] : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off., 1976
  
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Subject:Microélectronique
Subject:Silicon
Subject:Semiconducteurs
Subject:Microelectronics
Subject:Semiconductors
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