| Title: | Plasma Processing of Materials: Scientific Opportunities and Technological Challenges |
| Author: | National Research Council (U.S.). Board on Physics and Astronomy |
| Note: | 1991 |
| Link: | page images with commentary at NAP |
| Stable link here: | https://onlinebooks.library.upenn.edu/webbin/book/lookupid?key=olbp24605 |
| Subject: | Plasma engineering |
| Subject: | Microelectronics -- Materials -- Effect of radiation on |
| Subject: | Surfaces (Technology) |
| Call number: | TA2005 .N37 1991 |
| Other copies: | Look for editions of this book at your library, or elsewhere. |
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