| Title: | Beam Technologies for Integrated Processing |
| Author: | National Research Council (U.S.). National Materials Advisory Board |
| Note: | 1992 |
| Link: | page images with commentary at NAP |
| Stable link here: | https://onlinebooks.library.upenn.edu/webbin/book/lookupid?key=olbp24885 |
| Subject: | Microelectronics industry |
| Subject: | Molecular beams -- Industrial applications |
| Subject: | Microelectronics -- Materials |
| Subject: | Plasma-enhanced chemical vapor deposition -- Industrial applications |
| Call number: | TK7836 .N37 1992 |
| Other copies: | Look for editions of this book at your library, or elsewhere. |
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